The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2020
Filed:
Sep. 10, 2018
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Huimei Zhou, Albany, NY (US);
Gen Tsutsui, Glenmont, NY (US);
Andrew M. Greene, Albany, NY (US);
Dechao Guo, Niskayuna, NY (US);
Huiming Bu, Glenmont, NY (US);
Robert Robison, Colchester, VT (US);
Veeraraghavan S. Basker, Schenectady, NY (US);
Reinaldo Vega, Mahopac, NY (US);
Assignee:
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/088 (2006.01); H01L 21/762 (2006.01); H01L 29/66 (2006.01); H01L 21/32 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76202 (2013.01); H01L 21/32 (2013.01); H01L 29/66545 (2013.01); H01L 29/66795 (2013.01); H01L 29/785 (2013.01); H01L 29/7849 (2013.01);
Abstract
Integrated chips and methods of forming the same include oxidizing a portion of a semiconductor fin to electrically isolate active regions of the semiconductor fin. A semiconductor device is formed on each of the active regions.