The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 24, 2020

Filed:

Nov. 27, 2012
Applicant:

Kla-tencor Corporation, Milpitas, CA (US);

Inventors:

Hucheng Lee, Cupertino, CA (US);

Junqing Huang, Fremont, CA (US);

Lisheng Gao, Morgan Hill, CA (US);

Assignee:

KLA-Tencor Corporation, Milpitas, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06K 9/40 (2006.01); G06F 3/048 (2013.01); G06T 7/00 (2017.01); H01L 21/66 (2006.01); G01N 21/95 (2006.01); G01N 21/956 (2006.01); G01N 21/88 (2006.01);
U.S. Cl.
CPC ...
G06K 9/40 (2013.01); G06F 3/048 (2013.01); G06T 7/001 (2013.01); G01N 21/8851 (2013.01); G01N 21/9501 (2013.01); G01N 21/956 (2013.01); G06T 2207/30148 (2013.01); H01L 22/12 (2013.01); H01L 22/20 (2013.01); H01L 2924/0002 (2013.01);
Abstract

The disclosure is directed to providing visual feedback for inspection algorithms and difference filters used to process test and reference images from an inspection system. A user interface may be configured for displaying information and accepting user commands. A computing system communicatively coupled to the user interface may be configured to receive at least one set of test and reference images collected by the inspection system. The computing system may be further configured to provide at least one visual representation of the test and reference images via the user interface to show effects of an inspection algorithm and/or difference filter.


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