The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2020
Filed:
Jul. 10, 2015
Nuflare Technology, Inc., Yokohama-shi, Kanagawa-ken, JP;
Hideki Ito, Kanagawa, JP;
Hidekazu Tsuchida, Kanagawa, JP;
Isaho Kamata, Tokyo, JP;
Masahiko Ito, Kanagawa, JP;
Masami Naito, Aichi, JP;
Hiroaki Fujibayashi, Aichi, JP;
Katsumi Suzuki, Aichi, JP;
Koichi Nishikawa, Aichi, JP;
NuFlare Technology, Inc., Yokohama-shi, JP;
Abstract
A film forming apparatus according to an embodiment of the invention includes: a film forming chamber configured to form a film on a substrate; a susceptor configured to place the substrate thereon; a rotating part configured to rotate the susceptor; a heater configured to heat the substrate; and a gas supplier configured to supply process gases into the film forming chamber, wherein the susceptor includes: a ring-shaped outer circumferential susceptor supported by the rotating part; a holder provided at an inner circumferential portion of the outer circumferential susceptor, the holder configured to hold the substrate; a ring-shaped plate provided over the outer circumferential susceptor; and a cover member configured to cover a top surface and an outer circumferential surface of the plate and an outer circumferential surface of the outer circumferential susceptor.