The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2019
Filed:
Sep. 14, 2018
Applied Materials Israel Ltd., Rehovot, IL;
Shay Attal, Rehovot, IL;
Shaul Cohen, Irus, IL;
Guy Maoz, Rosh Pina, IL;
Noam Zac, Kefar Sava, IL;
Mor Baram, Ness Ziona, IL;
Lee Moldovan, Tel-Aviv, IL;
Ishai Schwarzband, Or-Yehuda, IL;
Ron Katzir, Tel Aviv, IL;
Kfir Ben-Zikri, Netivot, IL;
Doron Girmonsky, Raanana, IL;
Applied Materials Israel Ltd., Rehovot, IL;
Abstract
A method for evaluating an object, the method may include acquiring, by a charged particle beam system, an image of an area of a reference object, wherein the area includes multiple instances of a structure of interest, and the structure of interest is of a nanometric scale; determining multiple types of attributes from the image; reducing a number of the attributes to provide reduced attribute information; generating guidelines, based on the reduced attribute information and on reference data, for evaluating the reduced attribute information; and evaluating an actual object by implementing the guidelines.