The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2019
Filed:
Dec. 04, 2017
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Byunghoon Yoon, Sunnyvale, CA (US);
Seshadri Ganguli, Sunnyvale, CA (US);
Siddarth Krishnan, Newark, CA (US);
Paul F. Ma, Santa Clara, CA (US);
Sang Ho Yu, Cupertino, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/18 (2006.01); C23C 16/455 (2006.01); C23C 16/34 (2006.01); C23C 16/32 (2006.01);
U.S. Cl.
CPC ...
C23C 16/34 (2013.01); C23C 16/18 (2013.01); C23C 16/32 (2013.01); C23C 16/45525 (2013.01); C23C 16/45553 (2013.01);
Abstract
Methods for depositing a film comprising exposing a substrate surface to a metal precursor and a hydrazine derivative to form a metal containing film are described.
Quick Actions:
Yoon, Byunghoon. (2019). Synthesis of metal nitride thin films materials using hydrazine derivatives (U.S. Patent No. 10487398). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10487398
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile