The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2019
Filed:
Mar. 30, 2016
Applicant:
Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;
Inventors:
Toshifumi Honda, Tokyo, JP;
Takahiro Urano, Tokyo, JP;
Mamoru Kobayashi, Tokyo, JP;
Hisashi Hatano, Tokyo, JP;
Hironori Sakurai, Tokyo, JP;
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G01N 21/956 (2006.01); G01N 21/88 (2006.01); G05B 19/418 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01N 21/956 (2013.01); G01N 21/8806 (2013.01); G05B 19/41875 (2013.01); H01L 22/10 (2013.01); G01N 2201/061 (2013.01);
Abstract
The present invention aims at providing a defect inspection technique capable of setting parameters used for detecting a defect with a less burden to a user. A defect inspection device according to the present invention receives multiple reference values input by the user and calculates a defect extraction condition so as to optimize an evaluation value calculated with the use of the reference values, the number of actual reports, and the number of false reports (refer to FIG.).