The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2019
Filed:
Nov. 23, 2015
Kla-tencor Corporation, Milpitas, CA (US);
Eran Amit, Haifa, IL;
Barry Loevsky, Yokneam Ilit, IL;
Andrew Hill, Sunnyvale, CA (US);
Amnon Manassen, Haifa, IL;
Nuriel Amir, St. Yokne'am, IL;
Vladimir Levinski, Migdal Haemek, IL;
Roie Volkovich, Hadera, IL;
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
Targets, target elements and target design method are provided, which comprise designing a target structure to have a high contrast above a specific contrast threshold to its background in polarized light while having a low contrast below the specific contrast threshold to its background in non-polarized light. The targets may have details at device feature scale and be compatible with device design rules yet maintain optical contrast when measured with polarized illumination and thus be used effectively as metrology targets. Design variants and respective measurement optical systems are likewise provided.