The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 08, 2019

Filed:

Jan. 14, 2015
Applicant:

Rigaku Corporation, Akishima-shi, Tokyo, JP;

Inventors:

Takeshi Osakabe, Tokyo, JP;

Tetsuya Ozawa, Tokyo, JP;

Kazuhiko Omote, Tokyo, JP;

Licai Jiang, Auburn Hills, MI (US);

Boris Verman, Auburn Hills, MI (US);

Yuriy Platonov, Auburn Hills, MI (US);

Assignee:

RIGAKU CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/20008 (2018.01); G21K 1/04 (2006.01); G21K 1/06 (2006.01); G02B 7/00 (2006.01); G02B 27/42 (2006.01); G02B 27/09 (2006.01); G01N 23/207 (2018.01);
U.S. Cl.
CPC ...
G01N 23/20008 (2013.01); G02B 7/003 (2013.01); G02B 27/0977 (2013.01); G02B 27/4272 (2013.01); G21K 1/04 (2013.01); G21K 1/06 (2013.01); G21K 1/062 (2013.01); G01N 23/207 (2013.01); G01N 2223/056 (2013.01); G01N 2223/302 (2013.01); G01N 2223/315 (2013.01); G01N 2223/32 (2013.01); G21K 2201/067 (2013.01);
Abstract

Only X-rays having a specific wavelength, selected from a group of focusing X-rays diffracted from a sample, are reflected from a monochromator based on a Bragg's condition, passed through a receiving slit and detected by an X-ray detector. The monochromator is configured to be freely removable, and arranged between the sample and a focal point at which the wavelength-selected focusing X-rays diffracted from the sample are directly focused. At this time, the monochromator is moved so as to position the monochromator as close to the focal point as possible. The monochromator comprises a multilayer mirror having an internal interplanar spacing, wherein said internal interplanar spacing varies continuously from one end of the monochromator to the other end.


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