logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10359371 B1

PDFFull Text
Date of Patent:
Jul. 23, 2019

Filed:

Aug. 22, 2016

Determining one or more characteristics of a pattern of interest on a specimen

Applicant:

Kla-tencor Corporation, Milpitas, CA (US);

Inventors:

Brian Duffy, San Jose, CA (US);

Ashok Kulkarni, San Jose, CA (US);

Michael Lennek, Sunnyvale, CA (US);

Allen Park, San Jose, CA (US);

Assignee:

KLA-Tencor Corp., Milpitas, CA (US);

Attorney:

Ann Marie Mewherter

Primary Examiner:

Kim Y Vu

Assistant Examiner:

Nathan J Bloom

Int. Cl.
CPC ...
G06K 9/64 (2006.01); G06T 7/00 (2017.01); G01N 21/95 (2006.01); H01L 21/66 (2006.01); G01N 21/956 (2006.01); G05B 19/418 (2006.01);
U.S. Cl.
CPC ...
G01N 21/95607 (2013.01); G01N 21/9501 (2013.01); G05B 19/41875 (2013.01); G06K 9/64 (2013.01); G06T 7/001 (2013.01); H01L 22/20 (2013.01); G01N 2021/95615 (2013.01); G01N 2021/95676 (2013.01); G06T 2207/30148 (2013.01); H01L 22/12 (2013.01);
Abstract

Methods and systems for determining characteristic(s) of patterns of interest (POIs) are provided. One system is configured to acquire output of an inspection system generated at the POI instances without detecting defects at the POI instances. The output is then used to generate a selection of the POI instances. The system then acquires output from an output acquisition subsystem for the selected POI instances. The system also determines characteristic(s) of the POI using the output acquired from the output acquisition subsystem.

Find Patent Forward Citations

Loading…