The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2019
Filed:
Jul. 05, 2017
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Patricius Aloysius Jacobus Tinnemans, Hapert, NL;
Nan Lin, Eindhoven, NL;
Sander Bas Roobol, Veldhoven, NL;
Simon Gijsbert Josephus Mathijssen, Rosmalen, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/35 (2006.01); G01N 21/47 (2006.01); G01N 21/88 (2006.01); G01N 21/956 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G01N 21/8806 (2013.01); G01N 21/4788 (2013.01); G01N 21/956 (2013.01); G02F 1/353 (2013.01); G03F 7/70008 (2013.01); G03F 7/70616 (2013.01); G01N 2021/95676 (2013.01); G01N 2201/0697 (2013.01);
Abstract
Disclosed is an illumination source for generating measurement radiation for an inspection apparatus. The source generates at least first measurement radiation and second measurement radiation such that the first measurement radiation and the second measurement radiation interfere to form combined measurement radiation modulated with a beat component. The illumination source may be a HHG source. Also disclosed is an inspection apparatus comprising such a source and an associated inspection method.