The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2019
Filed:
Dec. 06, 2016
United Microelectronics Corp., Hsin-Chu, TW;
Hsin-Hsien Chen, New Taipei, TW;
Sheng-Yuan Hsueh, Tainan, TW;
Yi-Chung Sheng, Tainan, TW;
Wen-Kai Lin, Yilan County, TW;
Chih-Kai Kang, Tainan, TW;
UNITED MICROELECTRONICS CORP., Hsin-Chu, TW;
Abstract
The present invention provides a test key structure for measuring or simulating a target via array. The structure includes a substrate with a test region, a plurality of first conductive lines in the test region; a plurality of second conductive lines in the test region and on the first conductive lines, wherein the first conductive lines and the second conductive lines overlaps vertically in a plurality of target regions, and a plurality of vias disposed between the first conductive lines and the second conductive lines, wherein at least two vias vertically contact one of the first conductive lines and one of the second conductive lines. The present invention further provides a method of measuring resistance by using the testkey structure.