The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2019
Filed:
Mar. 30, 2017
Tokyo Electron Limited, Tokyo, JP;
Mitsuaki Iwashita, Koshi, JP;
Takeshi Nagao, Koshi, JP;
Nobutaka Mizutani, Tokyo, JP;
Takashi Tanaka, Koshi, JP;
Koichi Yatsuda, Tokyo, JP;
Kazutoshi Iwai, Koshi, JP;
Yuichiro Inatomi, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A catalyst is imparted selectively to a plateable material portionby performing a catalyst imparting processing on a substrate W having a non-plateable material portionand the plateable material portionformed on a surface thereof. Then, a hard mask layeris formed selectively on the plateable material portionby performing a plating processing on the substrate W. The non-plateable material portionis made of SiOas a main component, and the plateable material portionis made of a material including, as a main component, a material containing at least one of a OCHgroup and a NHgroup, a metal material containing Si as a main component, a material containing carbon as a main component or a catalyst metal material.