The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 05, 2019

Filed:

Sep. 29, 2016
Applicant:

Mitsubishi Electric Corporation, Chiyoda-ku, JP;

Inventors:

Rina Tanaka, Tokyo, JP;

Yutaka Fukui, Tokyo, JP;

Katsutoshi Sugawara, Tokyo, JP;

Takeharu Kuroiwa, Tokyo, JP;

Yasuhiro Kagawa, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 29/16 (2006.01); H01L 29/04 (2006.01); H01L 21/04 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 29/10 (2006.01);
U.S. Cl.
CPC ...
H01L 29/063 (2013.01); H01L 21/049 (2013.01); H01L 21/0465 (2013.01); H01L 29/045 (2013.01); H01L 29/1095 (2013.01); H01L 29/1608 (2013.01); H01L 29/66068 (2013.01); H01L 29/7813 (2013.01);
Abstract

A silicon carbide semiconductor device includes a silicon carbide drift layer formed on an upper surface of a silicon carbide semiconductor substrate having an off angle, a body region, a source region, a plurality of trenches, a gate insulating film, a gate electrode, a source electrode, a drain electrode, and a depletion suppressing layer. The depletion suppressing layer is positioned to be sandwiched between the plurality of trenches in a plan view, and in a direction with the off angle of the silicon carbide semiconductor substrate, a distance between the depletion suppressing layer and one of the trenches adjacent to the depletion suppressing layer is different from another distance between the depletion suppressing layer and the other one of the trenches adjacent to the depletion suppressing layer.


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