The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2019
Filed:
Oct. 30, 2015
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Amnon Manassen, Haifa, IL;
Yuri Paskover, Caesarea, IL;
Barry Loevsky, Yokneam Ilit, IL;
Daria Negri, Nesher, IL;
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/47 (2006.01); G03F 7/20 (2006.01); G06F 17/50 (2006.01);
U.S. Cl.
CPC ...
G01N 21/4785 (2013.01); G03F 7/70683 (2013.01); G06F 17/5072 (2013.01);
Abstract
Metrology targets, design files, and design and production methods thereof are provided. Metrology targets comprising at least one reflection-symmetric pair of reflection-asymmetric structures are disclosed. The structures may or may not be periodic, may comprise a plurality of unevenly-spaced target elements, which may or may not be segmented. The asymmetry may be with respect to target element segmentation or structural dimensions. Also, target design files and metrology measurements of the various metrology targets are disclosed.