The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2018
Filed:
Jan. 17, 2017
Kla-tencor Corporation, Milpitas, CA (US);
Joel Seligson, D.N. Misgav, IL;
Vladimir Levinski, Migdal HaEmek, IL;
Yuri Paskover, Caesarea, IL;
Amnon Manassen, Haifa, IL;
Daniel Kandel, Aseret, IL;
Andrew V. Hill, Portland, OR (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
Objective lenses and corresponding optical systems and metrology tools, as well as methods are provided. Objective lenses comprise a central region conforming to specified imaging requirements and a peripheral region conforming to specified scatterometry requirements. The optical systems may comprise common-path optical elements configured to handle both imaging and scatterometry signals received through the objective lens. Using a single objective lens simplifies the design of the optical system while maintaining, simultaneously, the performance requirements for imaging as well as for scatterometry.