The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 23, 2018

Filed:

Aug. 27, 2014
Applicant:

Xintec Inc., Zhongli, Taoyuan County, TW;

Inventors:

Chia-Sheng Lin, Zhongli, TW;

Yen-Shih Ho, Kaohsiung, TW;

Tsang-Yu Liu, Zhubei, TW;

Assignee:

XINTEC INC., Taoyuan, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 23/00 (2006.01); H01L 21/768 (2006.01); H01L 27/146 (2006.01); H01L 31/02 (2006.01); H01L 23/31 (2006.01);
U.S. Cl.
CPC ...
H01L 23/481 (2013.01); H01L 21/76898 (2013.01); H01L 24/03 (2013.01); H01L 24/05 (2013.01); H01L 27/1469 (2013.01); H01L 27/14618 (2013.01); H01L 27/14683 (2013.01); H01L 31/02005 (2013.01); H01L 23/3114 (2013.01); H01L 24/13 (2013.01); H01L 2224/02372 (2013.01); H01L 2224/0345 (2013.01); H01L 2224/0346 (2013.01); H01L 2224/0391 (2013.01); H01L 2224/0401 (2013.01); H01L 2224/05008 (2013.01); H01L 2224/05155 (2013.01); H01L 2224/05164 (2013.01); H01L 2224/05548 (2013.01); H01L 2224/05558 (2013.01); H01L 2224/05567 (2013.01); H01L 2224/05583 (2013.01); H01L 2224/05624 (2013.01); H01L 2224/05644 (2013.01); H01L 2224/05647 (2013.01); H01L 2224/05655 (2013.01); H01L 2224/13022 (2013.01); H01L 2224/13024 (2013.01); H01L 2224/13111 (2013.01); H01L 2924/1204 (2013.01); H01L 2924/12042 (2013.01); H01L 2924/12043 (2013.01);
Abstract

An electronic device package and fabrication method thereof is provided. First, a semiconductor substrate is provided and the upper surface of it is etched to from recesses. A first isolation layer is formed on the upper surface and the sidewalls of the recesses. A conductive part is formed to fulfill the recesses and a conductive pad is formed on the first isolation layer to connect the conductive part. An electronic device is combined with the semiconductor substrate on the supper surface, wherein the electronic device has a connecting pad electrically connected to the conductive pad. The semiconductor substrate is thinned form its lower surface to expose the conductive part. A second isolation layer is formed below the lower surface and has an opening to expose the conductive part. A redistribution metal line is formed below the second isolation layer and in the opening to electrically connect to the conductive part.


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