The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2018
Filed:
May. 19, 2017
Asml Netherlands B.v., Veldhoven, NL;
Andrey Alexandrovich Nikipelov, Veldhoven, NL;
Vadim Yevgenyevich Banine, Veldhoven, NL;
Pieter Willem Herman De Jager, Veldhoven, NL;
Gosse Charles De Vries, Veldhoven, NL;
Olav Waldemar Vladimir Frijns, Veldhoven, NL;
Leonardus Adrianus Gerardus Grimminck, Veldhoven, NL;
Andelko Katalenic, Veldhoven, NL;
Johannes Antonius Gerardus Akkermans, Veldhoven, NL;
Erik Loopstra, Veldhoven, NL;
Wouter Joep Engelen, Veldhoven, NL;
Petrus Rutgerus Bartraij, Veldhoven, NL;
Teis Johan Coenen, Veldhoven, NL;
Wilhelmus Patrick Elisabeth Maria Op 'T Root, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A photocathode comprises a substrate in which a cavity is formed and a film of material disposed on the substrate. The film of material comprises an electron emitting surface configured to emit electrons when illuminated by a beam of radiation. The electron emitting surface is on an opposite side of the film of material from the cavity.