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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10082471 B1

PDFFull Text
Date of Patent:
Sep. 25, 2018

Filed:

Jan. 02, 2017

Semiconductor structure and method for reviewing defects

Applicant:

United Microelectronics Corp., Hsin-Chu, TW;

Inventors:

Yung-Teng Tsai, Tainan, TW;

Hung-Chin Lin, Tainan, TW;

Chia-Chen Sun, Kaohsiung, TW;

Chih-Yu Wu, Tainan, TW;

Jun-Ming Chen, Hsinchu, TW;

Chung-Chih Hung, Kaohsiung, TW;

Sheng-Chieh Chen, Tainan, TW;

Assignee:

UNITED MICROELECTRONICS CORP., Hsin-Chu, TW;

Attorney:

Winston Hsu

Primary Examiner:

Hoa Pham

Int. Cl.
CPC ...
B81B 3/00 (2006.01); G01N 21/93 (2006.01); H01L 21/66 (2006.01); H01L 23/544 (2006.01); G01N 21/95 (2006.01);
U.S. Cl.
CPC ...
G01N 21/93 (2013.01); G01N 21/9501 (2013.01); H01L 22/32 (2013.01); H01L 23/544 (2013.01); H01L 2223/5446 (2013.01); H01L 2223/54426 (2013.01);
Abstract

A semiconductor structure includes a wafer comprising a plurality of viewing fields defined thereon, a plurality of dies defined by a scribe line formed in each viewing field, a plurality of mark patterns formed in the scribe line, and a plurality of anchor pattern respectively formed in the review fields, the anchor patterns being different from the mark patterns.

Find Patent Forward Citations

Tsai, Yung-Teng. (2018). Semiconductor structure and method for reviewing defects (U.S. Patent No. 10082471). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10082471

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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