The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2018
Filed:
Aug. 11, 2016
Applicant:
Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);
Inventors:
Owendi Ongayi, Tarragona, ES;
Charlotte Cutler, Marlborough, MA (US);
Mingqi Li, Marlborough, MA (US);
Shintaro Yamada, Marlborough, MA (US);
James Cameron, Marlborough, MA (US);
Assignee:
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/075 (2006.01); G03F 7/11 (2006.01); G03F 7/40 (2006.01); G03F 7/09 (2006.01); C08G 77/28 (2006.01); C08G 77/14 (2006.01); G03F 7/20 (2006.01); C09D 183/08 (2006.01); C09D 183/06 (2006.01); C08G 77/18 (2006.01); C08G 77/00 (2006.01); C08G 77/26 (2006.01); G03F 7/16 (2006.01); G03F 7/32 (2006.01);
U.S. Cl.
CPC ...
G03F 7/091 (2013.01); C08G 77/14 (2013.01); C08G 77/18 (2013.01); C08G 77/26 (2013.01); C08G 77/28 (2013.01); C08G 77/80 (2013.01); C09D 183/06 (2013.01); C09D 183/08 (2013.01); G03F 7/0752 (2013.01); G03F 7/168 (2013.01); G03F 7/20 (2013.01); G03F 7/32 (2013.01);
Abstract
Wet-strippable antireflective compositions comprising one or more silicon-containing polymers that are free of Q-monomers and hydridosilanes as polymerized units are provided. These compositions are useful in the manufacture of various electronic devices.