The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2018
Filed:
Jun. 30, 2015
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Roie Volkovich, Hadera, IL;
Eran Amit, Haifa, IL;
Nuriel Amir, St. Yokne'am, IL;
Michael E. Adel, Zichron Ya'akov, IL;
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); G05B 19/048 (2006.01); G03F 7/00 (2006.01); H01L 21/66 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G05B 19/048 (2013.01); G03F 7/0002 (2013.01); G03F 7/70625 (2013.01); H01L 22/12 (2013.01); H01L 22/20 (2013.01); G05B 2219/33285 (2013.01);
Abstract
Methods and metrology tool modules embodying the methods are provided. Methods comprise measuring characteristics of intermediate features such as guiding lines in a directed self-assembly (DSA) process, deriving exposure parameters from the measured characteristics; and adjusting production parameters for producing consecutive target features according to the derived exposure parameters. The methods and modules enhance the accuracy of the DSA-produced structures and related measurements.