The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 19, 2018

Filed:

Dec. 01, 2015
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Inventors:

Kang-woong Ko, Seoul, KR;

Sung-yoon Ryu, Suwon-si, KR;

Young-hoon Sohn, Incheon, KR;

Gil-woo Song, Hwaseong-si, KR;

Tae-heung Ahn, Seoul, KR;

Hyoung-jo Jeon, Suwon-si, KR;

Sang-kyeong Han, Seongnam-si, KR;

Masahiro Horie, Suwon-si, KR;

Woo-seok Ko, Seoul, KR;

Yu-sin Yang, Seoul, KR;

Sang-kil Lee, Yongin-si, KR;

Byeong-hwan Jeon, Yongin-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); G01J 4/00 (2006.01); G01N 21/21 (2006.01); G01N 21/956 (2006.01); G01N 21/95 (2006.01);
U.S. Cl.
CPC ...
G01N 21/8806 (2013.01); G01J 4/00 (2013.01); G01N 21/21 (2013.01); G01N 21/211 (2013.01); G01N 21/9501 (2013.01); G01N 21/956 (2013.01); G01J 2004/001 (2013.01); G01N 2021/213 (2013.01); G01N 2021/8848 (2013.01);
Abstract

A surface inspecting method includes: irradiating an incident light beam of a first polarized state on a target object, the incident light beam comprising parallel light and having a cross-sectional area: measuring a second polarized state of a reflected light beam reflected from the target object; and performing inspection on an entire area of the target object on which the incident light beam is irradiated, based on a variation between the first polarized state and the second polarized state.


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