Kang-woong Ko

Title: Innovations of Kang-woong Ko

Introduction

Kang-woong Ko is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of semiconductor technology, holding three patents that showcase his innovative approach to surface inspection and overlay error detection.

Latest Patents

One of his latest patents is a surface inspecting method. This method involves irradiating an incident light beam of a first polarized state on a target object. The incident light beam comprises parallel light and has a specific cross-sectional area. It measures a second polarized state of a reflected light beam from the target object and performs inspection on the entire area of the target object based on the variation between the first and second polarized states. Another notable patent is a method for detecting overlay error and a method for manufacturing semiconductor devices using the same. This method includes forming a first overlay key with spaced apart target patterns on a substrate layer, forming a second overlay key on a different layer, and detecting overlay errors by analyzing the phase pattern of reflected light.

Career Highlights

Kang-woong Ko is currently employed at Samsung Electronics Co., Ltd., a leading company in the technology sector. His work focuses on advancing semiconductor manufacturing processes, which are crucial for the development of modern electronic devices.

Collaborations

He collaborates with talented coworkers, including Hyoung-jo Jeon and Gil-woo Song, who contribute to his innovative projects and research efforts.

Conclusion

Kang-woong Ko's contributions to semiconductor technology through his patents reflect his expertise and commitment to innovation. His work continues to influence the industry and pave the way for future advancements.