Zhou Xiaofeng

Title: Zhou Xiaofeng: Innovator in Plasma Reactor Technology

Introduction

Zhou Xiaofeng is a notable inventor based in Shanghai, China. He has made significant contributions to the field of plasma technology, particularly with his innovative designs that enhance temperature control in plasma reactors. His work is instrumental in advancing manufacturing processes in various industries.

Latest Patents

Zhou Xiaofeng holds a patent for a Multi-zone temperature control plasma reactor. This invention includes a reaction chamber and a base designed to support a substrate. The reactor features an RF power supply that outputs RF power into the reaction chamber. The base incorporates an electrostatic chuck with a set of heaters, each consisting of a heater and an electronic switch connected in series. The heating controller is designed to receive temperature control signals and output drive signals to the electronic switches, ensuring precise temperature management.

Career Highlights

Zhou Xiaofeng is currently employed at Advanced Micro-Fabrication Equipment Inc. China, where he applies his expertise in plasma technology. His work at the company has positioned him as a key player in the development of advanced manufacturing equipment.

Collaborations

Zhou has collaborated with notable colleagues, including Tuqiang Ni and Steven Lee. Their combined efforts contribute to the innovative projects at Advanced Micro-Fabrication Equipment Inc. China.

Conclusion

Zhou Xiaofeng's contributions to plasma reactor technology exemplify the impact of innovation in manufacturing processes. His patent for the Multi-zone temperature control plasma reactor showcases his commitment to advancing technology in this field.