Zhongdu Liu

Title: Innovations of Zhongdu Liu in Plasma Processing Technology

Introduction

Zhongdu Liu is a notable inventor based in Shanghai, China. He has made significant contributions to the field of plasma processing technology. His innovative work focuses on improving the efficiency and effectiveness of substrate processing methods.

Latest Patents

Zhongdu Liu holds a patent for a "Capacitive-coupled plasma processing apparatus and method for processing substrate." This invention addresses the challenges associated with non-uniform etching rates on substrate surfaces caused by original radio frequency electric fields. The apparatus features an electric field regulating element, known as an 'electric field lens,' which generates a regenerated electric field. This innovation reduces the etching rate non-uniformity and prevents high-voltage electric arcing, thereby enhancing the overall processing quality.

Career Highlights

Zhongdu Liu is currently employed at Advanced Micro-Fabrication Equipment Inc. in Shanghai. His work at this company has allowed him to further develop his expertise in plasma processing technologies. His contributions have been instrumental in advancing the capabilities of the equipment used in this field.

Collaborations

Zhongdu Liu collaborates with Gerald Zheyao Yin, a fellow professional in the industry. Their partnership has fostered innovation and development in plasma processing techniques.

Conclusion

Zhongdu Liu's work in capacitive-coupled plasma processing represents a significant advancement in substrate processing technology. His innovative patent and career at Advanced Micro-Fabrication Equipment Inc. highlight his commitment to improving industry standards.