Location History:
- Hsinchu, TW (2020 - 2022)
- San Jose, CA (US) (2023)
Company Filing History:
Years Active: 2020-2023
Title: Zhiru Yu: Innovator in Semiconductor Manufacturing
Introduction
Zhiru Yu is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative approaches to optical proximity correction and machine learning applications.
Latest Patents
Zhiru Yu holds 3 patents that showcase his expertise and creativity. His latest patents include a machine learning-based model builder and its applications for pattern transferring in semiconductor manufacturing. This system optimizes an optical proximity correction (OPC) model for a mask pattern of a photo mask. The machine learning-based model builder incorporates an OPC model, measurement data, and a random term generator. Random terms are generated in an M-dimensional space, and the model classifies these terms into clusters using a classifying rule. A representative subset of the random terms is then determined and added to the OPC model.
Another notable patent involves lithographic mask correction using volume correction techniques. This method computes a mask volume correction matrix for a given mask layout, which is essential for performing a lithography process. The matrix represents a diffraction field for a predetermined thickness of the mask material. A simulated mask pattern is generated by applying this matrix to the mask layout, which is then provided to a mask-making tool.
Career Highlights
Zhiru Yu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to push the boundaries of innovation in semiconductor technology. His work has been instrumental in enhancing the efficiency and accuracy of semiconductor manufacturing processes.
Collaborations
Throughout his career, Zhiru has collaborated with notable colleagues, including Danping Peng and Junjiang Lei. These collaborations have further enriched his research and development efforts in the semiconductor field.
Conclusion
Zhiru Yu's contributions to semiconductor manufacturing through his innovative patents and collaborative efforts highlight his role as a leading inventor in the industry. His work continues to influence advancements in technology and manufacturing processes.