This inventor holds 1 USPTO granted patent and 3 published patent applications. Top assignee: Applied Materials, Inc.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Zhiren Luo and Semiconductor Processing Innovation.
Introduction
Zhiren Luo is an inventor based in San Jose, California, and is associated with Applied Materials, Inc. His patent work addresses semiconductor processing, particularly the etching of silicon nitride without halogen-containing chemistry.
Latest Patents
The provided information lists one patent for Luo: “Halogen-free etching of silicon nitride.” The disclosed methods use plasma effluents formed from a hydrogen-containing precursor to etch part of a silicon-and-nitrogen-containing layer on a substrate. The process takes place in a semiconductor processing chamber and is intended to support halogen-free material removal.
Career Highlights
Luo’s listed patent reflects work on plasma-based semiconductor fabrication methods. The supplied data identifies him as an inventor on one patent and connects his work with Applied Materials, Inc.
Collaborations
The provided information names Jeong Hwan Kim and Qian Fu as Luo’s coworkers. Their names are associated with his professional context, though specific collaborative roles are not detailed.
Conclusion
Zhiren Luo’s listed invention focuses on halogen-free silicon nitride etching, contributing to the development of semiconductor processing techniques at Applied Materials, Inc.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile