Zhidan Li

Title: Zhidan Li - Innovator in Laser Annealing Technology

Introduction

Zhidan Li is a prominent inventor based in Shanghai, China. He has made significant contributions to the field of laser technology, particularly in the area of laser annealing. His innovative approach has led to advancements that enhance the efficiency and effectiveness of the annealing process.

Latest Patents

Zhidan Li holds a patent for a "Laser annealing apparatus and laser annealing method." This invention includes a laser beam generator that provides a stable single-pulse laser, a cyclic delay unit that splits the single-pulse laser into several pulsed lasers, and an optical module that converges one or more of the pulsed lasers on a substrate. Additionally, a movable stage allows the substrate to move in at least one degree of freedom. The method involves providing a stable single-pulse laser, splitting it according to a delay requirement and energy ratio, and irradiating a substrate with the pulsed lasers to maintain the surface temperature around the melting point or the required annealing temperature for an extended period. This process results in improved laser energy utilization efficiency and enhances the overall annealing effect.

Career Highlights

Zhidan Li is associated with Shanghai Micro Electronics Equipment Co., Ltd., where he applies his expertise in laser technology. His work has been instrumental in developing advanced equipment that meets the demands of modern electronics manufacturing.

Collaborations

Zhidan Li collaborates with notable colleagues, including Jun Zhang and Zhe Li. Their combined efforts contribute to the innovative projects at their company, fostering a collaborative environment that drives technological advancements.

Conclusion

Zhidan Li's contributions to laser annealing technology exemplify the impact of innovation in the electronics industry. His patent and work at Shanghai Micro Electronics Equipment Co., Ltd. highlight his role as a key figure in advancing laser technology.