Zhenijiang Cui

Title: Zhenijiang Cui: Innovator in Semiconductor Technology

Introduction

Zhenijiang Cui is a prominent inventor based in San Jose, CA, known for his contributions to semiconductor technology. He has developed innovative processes that enhance the performance and reliability of semiconductor devices. His work is particularly focused on improving the interface between dielectric films and copper lines.

Latest Patents

Zhenijiang Cui holds a patent titled "Selective copper-silicon-nitride layer formation for an improved dielectric film/copper line interface." This patent describes a process to form a copper-silicon-nitride layer on a copper surface on a semiconductor wafer. The process includes exposing the wafer to a first plasma made from helium, followed by a second plasma made from a reducing gas to remove copper oxide from the copper surface. Additionally, the wafer is exposed to silane, which reacts with the copper surface to selectively form copper silicide. Finally, the wafer is treated with a third plasma made from ammonia and molecular nitrogen to create the copper silicon nitride layer. This innovative approach significantly enhances the performance of semiconductor devices.

Career Highlights

Zhenijiang Cui is currently employed at Applied Materials, Inc., a leading company in the semiconductor manufacturing industry. His work at Applied Materials has positioned him as a key player in advancing semiconductor technologies. With a focus on improving material interfaces, his contributions are vital to the development of next-generation semiconductor devices.

Collaborations

Zhenijiang has collaborated with notable colleagues, including Sang M Lee and Vladimir Zubkov. These collaborations have fostered an environment of innovation and have led to significant advancements in semiconductor technology.

Conclusion

Zhenijiang Cui is a distinguished inventor whose work in semiconductor technology has made a lasting impact. His innovative processes and collaborations continue to drive advancements in the field, showcasing his commitment to improving semiconductor performance.