Company Filing History:
2 out of 14 
2 out of 34 
1 out of 18 Years Active: 2013-2022
Title: Zhaoyang Xu: Innovator in Plasma Technology
Introduction
Zhaoyang Xu is a prominent inventor based in Shanghai, China, known for his contributions to plasma technology and gas distribution systems. With a total of five patents to his name, Xu has made significant advancements in the field, particularly in the design and manufacturing of gas showerheads and plasma confinement apparatuses.
Latest Patents
Xu's latest patents include a gas showerhead and a manufacturing method, as well as a plasma apparatus that incorporates the gas showerhead. The gas showerhead features a back plate and a gas distribution plate, which includes multiple annular gas distribution regions centered around the gas distribution plate. Each region is equipped with several gas through-holes that penetrate both the gas inlet and outlet faces. Notably, the design includes first gas through-holes that are inclined at a specific angle, alongside second gas through-holes that are either parallel to the central axis or have a different radial inclination. This innovative design ensures that gas flowing from the first and second through-holes remains separated within the same annular region. Additionally, Xu has developed a plasma confinement apparatus that includes electrically insulated components arranged in a specific configuration around a plasma processing region, enhancing the efficiency of plasma confinement.
Career Highlights
Zhaoyang Xu has worked with Advanced Micro-Fabrication Equipment Inc. in Shanghai, where he has applied his expertise in plasma technology. His work has contributed to the development of advanced manufacturing techniques and equipment used in various industrial applications.
Collaborations
Throughout his career, Xu has collaborated with notable colleagues, including Xiaoming He and Lei Wan, who have also contributed to advancements in the field of micro-fabrication and plasma technology.
Conclusion
Zhaoyang Xu's innovative work in gas distribution and plasma technology has positioned him as a key figure in the industry. His patents reflect a commitment to advancing manufacturing processes and enhancing the efficiency of plasma applications.
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