Company Filing History:
Years Active: 2016-2023
Title: Innovations by Inventor Yuya Nonaka
Introduction
Yuya Nonaka is a prominent inventor based in Kawasaki, Japan, known for his significant contributions to substrate processing technology. With a total of four patents, Nonaka has made strides in developing apparatuses that enhance the efficiency and effectiveness of substrate processing in various applications.
Latest Patents
Yuya Nonaka's latest innovations include two noteworthy patents. The first is a "Substrate Processing Apparatus and Method of Processing Substrate." This apparatus features a stage within a chamber, paired with a shower head that has multiple slits. The design allows for the supply of a first gas through these slits while also enabling a second gas, which is not a noble gas, to be supplied below the stage. Notably, this second gas can either match one of the gases comprising the first in a mixture or be identical to the first gas in cases where only a single kind of gas is used.
The second patent is for a "Film Forming Apparatus." This device includes a chamber and processing space, with a stage where the substrate is placed. A diffusion tube connects to the chamber, creating a diffusion space directly above the stage, where a gas supply tube extends from the outside to deliver a material gas. The innovative design of the gas supply orifice facilitates the ejection of the gas away from the stage, enhancing processing efficiency.
Career Highlights
Currently, Yuya Nonaka is associated with ASM IP Holding B.V., a company recognized for its research and development in advanced semiconductor technology. His work is pivotal to the innovation of systems that cater to the increasing demands of the semiconductor industry.
Collaborations
Throughout his career, Nonaka has collaborated with notable colleagues such as Hiroki Arai and Richika Kato. Their joint efforts are instrumental in advancing research and development initiatives within their field, demonstrating the power of teamwork in driving innovation.
Conclusion
Yuya Nonaka’s contributions to technology through his patents highlight his expertise and creativity as an inventor. With continual advancements in substrate processing technologies, his work is likely to have a lasting impact on the industry and pave the way for future innovations.