Company Filing History:
Years Active: 2008-2012
Title: Yuuji Yada: Innovator in Radiation-Sensitive Resin Compositions
Introduction
Yuuji Yada is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of radiation-sensitive resin compositions, holding a total of 2 patents. His work focuses on enhancing the performance and stability of these materials, which are crucial in various technological applications.
Latest Patents
Yuuji Yada's latest patents include a radiation-sensitive resin composition and a positive-tone radiation-sensitive resin composition. The radiation-sensitive resin composition aims to provide a formulation that includes a radiation-sensitive acid generator, which excels in resolution performance, heat stability, and storage stability. This composition effectively suppresses fluctuations in line width and improves nano edge roughness and line edge roughness (LEF). It features a sulfonium salt compound and a sulfonimide compound, along with a resin typified by a 4-hydroxystyrene/4-t-butoxystyrene copolymer.
The positive-tone radiation-sensitive resin composition contains an anthracene-based carboxylic acid component that exhibits low sublimation properties. This composition is designed to optimize radiation transmittance and effectively control line width variation in resist patterns. It comprises an anthracene derivative, a photoacid generator, and a resin containing an acid-dissociable group, ensuring excellent performance in deep ultraviolet applications.
Career Highlights
Yuuji Yada is currently employed at JSR Corporation, where he continues to innovate in the field of radiation-sensitive materials. His work has been instrumental in advancing the technology used in photolithography and other applications that require precise material properties.
Collaborations
Yuuji collaborates with talented coworkers, including Tomoki Nagai and Daisuke Shimizu. Their combined expertise contributes to the development of cutting-edge materials and technologies.
Conclusion
Yuuji Yada's contributions to radiation-sensitive resin compositions highlight his role as a key innovator in the field. His patents reflect a commitment to improving material performance and stability, which are essential for advancing technology.