This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Mitsui Chemicals, Inc.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Yutaka Yoshimura: Innovator in Pellicle Technology
Introduction
Yutaka Yoshimura is a notable inventor based in Tokyo, Japan. He has made significant contributions to the field of pellicle technology, which is essential in the semiconductor manufacturing process. His innovative work has led to the development of a unique patent that addresses critical challenges in the industry.
Latest Patents
Yutaka Yoshimura holds a patent for a pellicle, exposure master, exposure device, pellicle production method, and test method for mask adhesive layer. This invention provides a pellicle that includes a frame on which a pellicle film is placed, along with a mask adhesive layer situated on the frame. The patent details a process where the attachment portion of the adhesive layer to a quartz mask is irradiated with xenon (Xe) excimer lamp light from the back surface of the mask for two minutes. After this process, when the pellicle is peeled off, the residual ratio of the adhesive layer on the quartz mask is maintained between 0.001 to 5.0%. This innovation is crucial for enhancing the efficiency and effectiveness of semiconductor manufacturing.
Career Highlights
Yutaka Yoshimura is currently employed at Mitsui Chemicals, Inc., where he continues to develop and refine his inventions. His work at the company has positioned him as a key player in advancing pellicle technology. With a focus on innovation, he has contributed to the company's reputation as a leader in the chemical industry.
Collaborations
Yutaka has collaborated with several talented individuals in his field, including Keiichi Kakihara and Ryo Tanaka. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies.
Conclusion
Yutaka Yoshimura's contributions to pellicle technology exemplify the importance of innovation in the semiconductor industry. His patent and ongoing work at Mitsui Chemicals, Inc. highlight his commitment to advancing technology and improving manufacturing processes. His achievements serve as an inspiration for future inventors in the field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile