Company Filing History:
Years Active: 2007-2011
Title: Yutaka Mori: An Innovator in Electrostatic Technology
Introduction
Yutaka Mori is a prominent inventor based in Nagoya, Japan, renowned for his innovative contributions to the field of electrostatic technology. With a remarkable portfolio that includes 8 patents, Yutaka has played a significant role in advancing the development and efficiency of electrostatic chuck systems.
Latest Patents
Yutaka's latest innovations include the "Electrostatic Chuck Heater," an advanced device designed to optimize the heating process in electrostatic applications. This invention features a unique base created by applying conductive paste onto an alumina sintered body, followed by precise calcination. The design includes an alumina powder arrangement above and below the electrodes, ensuring effective pressure sintering. Importantly, the diffusion area ratio of the conductive material in the dielectric layer is maintained at no more than 0.25%.
Additionally, Yutaka developed an "Electrostatic Chuck and Method for Manufacturing the Same." This invention incorporates a base containing aluminum nitride and a dielectric layer composed of materials that maintain high volume resistivity across a wide temperature range. The embedded electrode generates an electrostatic absorption force, enhancing the performance of the electrostatic chuck in various applications.
Career Highlights
Yutaka Mori has made significant strides in his career while working at NGK Insulators, Inc. His inventions reflect a deep understanding of materials science and engineering, contributing greatly to the efficiency and effectiveness of electrostatic devices used in a variety of industrial applications.
Collaborations
Throughout his career, Yutaka has collaborated with talented colleagues, including Kazuhiro Nobori and Hiroto Matsuda. Their combined expertise has led to fruitful outcomes in research and development, helping push forward innovations in electrostatic technologies.
Conclusion
Yutaka Mori continues to be a key figure in the electrostatic technology landscape. His latest inventions not only showcase his ingenuity but also demonstrate the impact of collaborative efforts in the field. With his ongoing contributions, Yutaka is set to influence the future of electrostatic applications significantly.
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