Ngk Insulators, Inc.

Yutaka Mori

Kazuhiro Nobori

Hiroto Matsuda

Akiyoshi Hattori

Tomoyuki Fujii

Keiichi Nakamura

Takeru Torigoe

An electrostatic chuck heater is provided including a base which is formed by applying conductive paste containing a binder to upper and lower surfaces of an alumina sintered body to print an electrostatic electrode and heater electrode, calcining the alumina sintered body, arranging alumina powder above the electrostatic electrode and alumina powder below the heater electrode, and pressing the alumina powder and alumina sintered body in the above state for pressure sintering. The diffusion area ratio of the conductive material near the electrostatic electrode in the dielectric layer is set to not more than 0.25%.

Electrostatic chuck heater

The electrostatic chuck includes a base including an aluminum nitride-containing member; a dielectric layer formed on the base including a member having a volume resistivity of at least 1&#xd7;10&#x3a9;&#xb7;cm at a temperature range of about 25&#xb0; C. to about 300&#xb0; C. and including 2 to 5% by mass of yttrium oxide, 2 to 5% by mass of ytterbium oxide, and a balance of aluminum nitride based on the total mass of the dielectric layer; and an electrode embedded under the dielectric layer so as to be positioned between the dielectric layer and the base, configured to generate an electrostatic absorption force.

Electrostatic chuck and method for manufacturing the same

An electrostatic chuck includes a base of a sintered body containing alumina, an electrode as a power-supplied member embedded in the base and supplied with electric power, a bonding member embedded in the base and bonded to the electrode, in which a difference in coefficient of thermal expansion from the sintered body is 2&#xd7;10/K or less, and a melting point is higher than baking temperature of the sintered body, and a terminal bonded to the electrode through the bonding member.

Alumina member and manufacturing method thereof

A manufacturing method for a sintered body having a metallic member buried therein is provided, and includes forming an alumina sintered body, forming a metallic member by printing a printing paste including a refractory metal on the alumina sintered body, forming a green alumina compact on the metallic member, and sintering the alumina compact, the metallic member, and the alumina sintered body or the alumina presintered body.

Manufacturing method for sintered body with buried metallic member

An alumina sintered body comprises an alumina substrate having a first main surface and a second main surface opposing each other, an embedded film electrode made of a metal and embedded in the alumina substrate at a depth Hof 0.4 mm or less from a first main surface SF, and an embedded terminal formed of a metal, embedded in the alumina substrate nearer a second main surface SFside than the embedded electrode. The embedded terminal is in contact with the embedded electrode and a film thickness Hof the embedded electrode is 25 &#x3bc;m or less.

Alumina sintered body

A binder is mixed to alumina powder with a purity of 99.5% or more (step S), the mixture is granulated (step S), resultant granule powder is formed with a die (step S), and a formed compact is sintered in a hot-pressing manner (step S).

Alumina-sintered body and associated manufacturing method, and electrostatic chuck and associated manufacturing method

A method of manufacturing an electrical-resistance heating element includes forming sintered ceramics or calcined ceramics, forming an electrode on the sintered ceramics or the calcined ceramics, and forming a ceramic base material having mainly a high melting point metal on the electrode embedded therein, thereby forming a heating element with built-in electrode.

Method of manufacturing electrical resistance heating element

A bonding member is provided, including, a ceramic member having a concave portion, a metal member having a convex portion corresponding to the concave portion of the ceramic member. A first bonding material joins a bottom portion of the concave portion of the ceramic member and a tip portion of the convex portion of the metal member. The first bonding material has a porous structure, including particles and a brazing filler metal, and covers a corner between tip and side portions of the metal member. A second bonding material including a brazing filler metal joins the side portion of the concave portion of the ceramic member and the side portion of the convex portion of the metal member.

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Nagoya, Japan

Yutaka Mori