Location History:
- Tokyo, JP (2000 - 2006)
- Miyagi, JP (2007)
Company Filing History:
Years Active: 2000-2007
Title: Yutaka Kamata: Innovator in Semiconductor Technology
Introduction
Yutaka Kamata is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His innovative approaches have advanced the manufacturing processes of semiconductor devices, showcasing his expertise and dedication to the industry.
Latest Patents
Kamata's latest patents include a method of manufacturing semiconductor devices and a method of etching back semiconductor wafers. The first patent describes a process where an impurity is ion-implanted with a silicon nitride film formed on a silicon substrate as a mask film to create a source/drain layer of a MOS transistor. Notably, heat treatment for activating the impurity is performed without removing the silicon nitride film, which produces heat treatment-based stress between the silicon nitride film and the silicon substrate. The second patent outlines a method where a resist pattern is formed at the outermost peripheral end of the wafer's surface. The back of the wafer is then back-etched using chemicals to thin it, leaving a passivation film only at the scribe lines for separating semiconductor chips.
Career Highlights
Yutaka Kamata is associated with Oki Electric Industry Co., Ltd., where he has been instrumental in developing cutting-edge semiconductor technologies. His work has not only contributed to the company's success but has also positioned him as a key figure in the semiconductor industry.
Collaborations
Kamata has collaborated with notable colleagues such as Satoshi Ikeda and Ikuo Kurachi. Their combined efforts have led to advancements in semiconductor manufacturing techniques and have fostered a collaborative environment that encourages innovation.
Conclusion
Yutaka Kamata's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the industry positively, paving the way for future innovations in semiconductor manufacturing.