This inventor holds 1 USPTO granted patent. Top assignee: Shinko Electric Industries Inc., Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Yuta Naito: Inventor of a Substrate Fixing Device
Introduction
Yuta Naito is an inventor based in Nagano, Japan. His patent work includes a substrate fixing device designed with layers that manage heat transfer and support an electrostatic chuck.
Latest Patents
Naito is associated with 1 patent. His patent, “Substrate Fixing Device,” describes a base plate with an adhesive layer, a heat-insulating layer, and an electrostatic chuck. The chuck includes a base containing an electrostatic electrode. The heat-insulating layer has lower thermal conductivity than both the chuck’s base and the adhesive layer.
Career Highlights
Naito is associated with Shinko Electric Industries, Ltd. His patented device combines substrate fixation with thermal insulation in a layered structure.
Collaborations
Yuma Terashima and Shun Takagi are identified as Naito’s coworkers. The information provided does not specify their roles in developing or patenting the device.
Conclusion
Yuta Naito’s patent describes a layered substrate fixing device that integrates an electrostatic chuck with thermal insulation, reflecting his work in invention and patent development.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile