Yusuke Kikuchi

Title: Yusuke Kikuchi: Innovator in Substrate Processing Technology

Introduction

Yusuke Kikuchi is a notable inventor based in Yamanashi, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 2 patents. His work focuses on innovative apparatuses that enhance the efficiency and effectiveness of substrate handling and film formation.

Latest Patents

Kikuchi's latest patents include a "Placing Table and Substrate Processing Apparatus" and a "Magnetron Sputtering Apparatus and Magnetron Sputtering Method." The placing table patent features an electrostatic chuck designed to attract and hold a substrate while being rotatable. It also includes a freezing device to cool the electrostatic chuck and a power controller to apply a radio frequency bias voltage. The magnetron sputtering apparatus patent describes a vacuum chamber with multiple sputtering mechanisms, a power supply for plasma formation, and a gas supplier for creating the necessary environment for film deposition.

Career Highlights

Yusuke Kikuchi is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has allowed him to develop cutting-edge technologies that are crucial for modern manufacturing processes.

Collaborations

Kikuchi has collaborated with notable coworkers, including Tetsuya Miyashita and Kanto Nakamura. Their combined expertise contributes to the innovative projects at Tokyo Electron Limited.

Conclusion

Yusuke Kikuchi's contributions to substrate processing technology through his patents and work at Tokyo Electron Limited highlight his role as a key innovator in the field. His inventions continue to influence advancements in semiconductor manufacturing.