Company Filing History:
Years Active: 2020-2025
Title: Yusuke Hayasaka: Innovator in Plasma Processing Technology
Introduction
Yusuke Hayasaka is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 5 patents. His work focuses on enhancing the efficiency and effectiveness of substrate processing apparatuses.
Latest Patents
One of Hayasaka's latest inventions is a plasma processing apparatus. This apparatus features an electrostatic chuck with a first region for substrate placement and a second region for an edge ring. The first region contains a first electrode, while the second region includes a second electrode. A first feed line connects the first electrode to a bias power supply, which generates a pulsed voltage. Additionally, a second feed line connects the second electrode to either the same or a different bias power supply. This second feed line is designed with flexibility in its feed pins, allowing for efficient connection to sockets.
Another notable invention is a substrate processing apparatus that includes a chamber with a plasma processing space. This chamber has an opening for substrate transfer and a shutter that can open or close this opening. The shutter is equipped with a flow path for a temperature-controlled fluid, enhancing the processing capabilities of the apparatus.
Career Highlights
Yusuke Hayasaka is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His innovative work has positioned him as a key figure in advancing plasma processing technologies.
Collaborations
Hayasaka has collaborated with notable coworkers, including Shuhei Yamabe and Kazuya Matsumoto. Their combined expertise has contributed to the development of cutting-edge technologies in the field.
Conclusion
Yusuke Hayasaka's contributions to plasma processing technology through his patents and work at Tokyo Electron Limited highlight his role as a significant innovator in the industry. His inventions continue to influence the efficiency of substrate processing, showcasing the importance of innovation in technology.