Location History:
- Saitama, JP (2010)
- Ageo, JP (2012 - 2016)
Company Filing History:
Years Active: 2010-2016
Title: Yusaku Uehara: Innovator in Exposure Technology
Introduction
Yusaku Uehara is a notable inventor based in Ageo, Japan. He has made significant contributions to the field of exposure technology, holding a total of three patents. His work primarily focuses on methods and devices that enhance the precision and efficiency of exposure processes in manufacturing.
Latest Patents
Uehara's latest patents include an innovative exposure method and device manufacturing method that involves selective deformation of a mask. This method utilizes a substrate held by a holding member to perform exposure processing. It includes a holding process that secures a prescribed region of the substrate and a deformation process that selectively deforms one side of the holding region. This approach allows for the elimination of nonlinear deformation components, thereby reducing warping of the pattern projected via the substrate.
Another significant patent involves an exposure apparatus equipped with an optical system that includes a liquid. This apparatus features a sensor system that acquires energy information of an energy beam incident on the liquid. A controller predicts variations in the optical properties of the system due to energy absorption and adjusts the exposure operation accordingly. This innovation ensures that exposure operations are not influenced by changes in the optical properties, enhancing the reliability of the process.
Career Highlights
Yusaku Uehara is currently employed at Nikon Corporation, a leading company in imaging and optical products. His work at Nikon has allowed him to push the boundaries of exposure technology, contributing to advancements in the field.
Collaborations
Uehara has collaborated with notable coworkers, including Alton Hugh Phillips and Douglas C Watson. Their combined expertise has fostered a collaborative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
Yusaku Uehara's contributions to exposure technology through his patents and work at Nikon Corporation highlight his role as a key innovator in the field. His advancements not only improve manufacturing processes but also pave the way for future innovations in exposure methods.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.