The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2012
Filed:
May. 23, 2006
Yusaku Uehara, Ageo, JP;
Kousuke Suzuki, Saitama, JP;
Katsushi Nakano, Kumagaya, JP;
Yasuhiro Omura, Kounosu, JP;
Yusaku Uehara, Ageo, JP;
Kousuke Suzuki, Saitama, JP;
Katsushi Nakano, Kumagaya, JP;
Yasuhiro Omura, Kounosu, JP;
Nikon Corporation, Tokyo, JP;
Abstract
An exposure apparatus is provided with an optical system including a liquid, a sensor system for acquiring energy information of an energy beam which is incident on the liquid, and a controller which predicts variation of optical properties of the optical system including the liquid due to energy absorption of the liquid based on the energy information acquired using the sensor system and controls exposure operation with respect to an object based on the prediction results. According to the exposure apparatus, exposure operation without being influenced by the variation of the optical properties of the optical system including the liquid due to the energy absorption of the liquid becomes possible.