Location History:
- Albany, NY (US) (2022)
- Choes, NY (US) (2024)
Company Filing History:
Years Active: 2022-2024
Title: Innovations of Yunho Kim in Plasma Processing Technology
Introduction
Yunho Kim is a notable inventor based in Albany, NY (US), recognized for his contributions to plasma processing technology. He holds a total of 3 patents, showcasing his innovative approach in this specialized field.
Latest Patents
Among his latest patents, Yunho Kim has developed a plasma processing system and method using radio frequency and microwave power. This system includes a vacuum system and a plasma processing chamber that features a chamber cavity coupled to the vacuum system. It also incorporates a substrate holder with a surface inside the chamber cavity and a radio frequency (RF) source electrode connected to an RF power source, which is designed to ignite plasma within the chamber. Additionally, the system includes a microwave source linked to a microwave oscillator and an electromagnetic (EM) metasurface. The EM metasurface is configured to couple microwave power to the plasma in the chamber cavity, enhancing the efficiency of the processing system.
Another significant patent by Yunho Kim is a similar plasma processing system that also utilizes RF and microwave power. This system features a vacuum system and a plasma processing chamber, along with a substrate holder and an RF source electrode. It further includes a microwave source and a conductive spatial uniformity component with multiple through openings, designed to ensure uniform microwave power coupling to the plasma.
Career Highlights
Yunho Kim is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work focuses on advancing plasma processing technologies, which are crucial for various applications in electronics.
Collaborations
Yunho Kim collaborates with talented coworkers, including Mingmei Wang and Yanxiang Shi, contributing to innovative projects and research in plasma processing.
Conclusion
Yunho Kim's work in plasma processing technology exemplifies his commitment to innovation and advancement in the field. His patents reflect significant contributions that enhance the efficiency and effectiveness of plasma processing systems.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.