This inventor holds 1 USPTO granted patent. Top assignee: Other. Active years: 2001.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2001
Title: Yung-Tai Tseng: Innovator in Polishing Technology
Introduction
Yung-Tai Tseng is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of polishing technology, particularly in methods that enhance the efficiency and cleanliness of polishing machines. His innovative approach addresses critical issues related to particle contamination during the polishing process.
Latest Patents
Yung-Tai Tseng holds a patent for a "Method and apparatus for preventing particle contamination in a polishing machine." This invention discloses a method aimed at preventing particle contamination in polishing machines that utilize slurry compositions for material removal from substrate surfaces. The method is particularly effective in chemical mechanical polishing (CMP) apparatuses, where it employs a series of cleaning devices equipped with bendable, shapable conduits and spray nozzles. These devices dispense cleaning solvents, such as deionized water, onto the chamber components, effectively removing slurry deposits and minimizing sources of particle contamination.
Career Highlights
Throughout his career, Yung-Tai Tseng has demonstrated a commitment to innovation in the polishing technology sector. His work has not only advanced the technical capabilities of polishing machines but has also contributed to the overall efficiency of manufacturing processes that rely on these technologies. His patent reflects a deep understanding of the challenges faced in the industry and offers practical solutions to enhance operational performance.
Collaborations
Yung-Tai Tseng has collaborated with notable colleagues, including Chih-Chiang Yang and Yu-Chia Chang. These partnerships have likely fostered a creative environment that encourages the exchange of ideas and the development of cutting-edge technologies in the field.
Conclusion
Yung-Tai Tseng's contributions to polishing technology through his innovative patent highlight his role as a significant inventor in the industry. His work not only addresses critical challenges but also paves the way for future advancements in polishing methods.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile