Location History:
- Seoul, KR (2001 - 2002)
- Gwacheon, KR (2007)
Company Filing History:
Years Active: 2001-2007
Title: Innovations of Yun-sook Chae
Introduction
Yun-sook Chae is a prominent inventor based in Seoul, South Korea. She has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. Her work focuses on methods that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Among her latest patents is a method of forming a photoresist pattern and a method for patterning a layer using a photoresist. This innovative approach involves the formation of an organic anti-reflective coating (ARC) over a semiconductor substrate, followed by the application of a resist layer containing a photosensitive polymer. The resist layer undergoes exposure and development to create a resist pattern, which is then silylated to a specific depth using a vapor phase organic silane mixture. This process allows for precise etching of the organic ARC using the thermally treated resist pattern as a mask.
Another notable patent involves a method of delivering gas into a reaction chamber and a shower head designed for gas delivery. This method enables the deposition of two or more mutually-reactive reaction gases on a substrate while preventing the formation of contaminating particles. The innovative shower head design features separate passages that ensure the first reaction gas does not mix with the others, optimizing the film deposition rate.
Career Highlights
Yun-sook Chae is currently employed at Samsung Electronics Co., Ltd., where she continues to push the boundaries of semiconductor technology. Her work has been instrumental in advancing the efficiency of manufacturing processes within the industry.
Collaborations
She collaborates with talented colleagues, including Sang-in Lee and Sang-Bom Kang, who contribute to her innovative projects and research endeavors.
Conclusion
Yun-sook Chae's contributions to semiconductor technology through her patents and work at Samsung Electronics Co., Ltd. highlight her role as a leading inventor in her field. Her innovative methods are paving the way for advancements in semiconductor manufacturing processes.