Yun Sang Kim

Title: Innovations of Yun Sang Kim in Substrate Processing

Introduction

Yun Sang Kim is a notable inventor based in Seongnam-si, South Korea. He has made significant contributions to the field of substrate processing, holding a total of 3 patents. His work focuses on advanced methods and apparatuses that enhance the efficiency and effectiveness of substrate processing techniques.

Latest Patents

Yun Sang Kim's latest patents include an "Apparatus and method for processing substrate." This innovative method allows for stable atomic layer etching without damaging the process chamber. The process involves providing a substrate with a target layer in a chamber, forming a first plasma using a chlorine-containing gas to reform the target layer, and subsequently forming a second plasma with an oxygen-containing gas to further reform the target layer. The method also includes providing a precursor to react with the reformed target layer and removing portions of the target layer through repeated plasma formation and precursor application.

Another significant patent is the "Substrate processing apparatus and substrate processing method." This apparatus features a processing chamber with a transparent window, a gas flow unit for supplying and discharging process gas, and a laser irradiator that heats the substrate for selective atomic layer processing of multiple thin films. This design allows for enhanced precision in substrate processing.

Career Highlights

Yun Sang Kim is currently employed at Semes Co., Ltd., where he continues to innovate in the field of substrate processing. His work has been instrumental in advancing technologies that are crucial for various applications in semiconductor manufacturing.

Collaborations

Yun Sang Kim collaborates with talented individuals such as Jin Hee Hong and Yoon Seok Choi. Their combined expertise contributes to the development of cutting-edge technologies in substrate processing.

Conclusion

Yun Sang Kim's contributions to substrate processing through his innovative patents and collaborations highlight his role as a key figure in the field. His work continues to influence advancements in technology and manufacturing processes.