Company Filing History:
2 out of 1,532 
2 out of 51 
1 out of 1 Years Active: 1993-1997
Title: Innovations of Yukio Tsutsumi
Introduction
Yukio Tsutsumi is a notable inventor based in Tokyo, Japan. He has made significant contributions to the field of wafer processing technology. With a total of 3 patents, his work has advanced the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
One of his latest patents is an "Apparatus for polishing wafer." This invention is designed to carry out a chemical mechanical polishing operation. The apparatus includes a lower polishing plate assembly, a first rotating mechanism for rotating the first polishing plate assembly, an upper polishing plate assembly, a second rotating mechanism for rotating the upper polishing plate assembly, a pressing mechanism, a conveying mechanism, and a discharging mechanism. The lower polishing plate assembly features a lower polishing plate, a polishing pad, and a porous sheet interposed between the lower polishing plate and the polishing pad. The porous sheet has a thickness of 0.5 to 3 mm and is formed of a foaming resin. The upper polishing plate assembly consists of an upper polishing plate, a plate-like chuck, a backing pad, a pressure reducing unit, and a cleaning unit.
Another significant patent is the "Wafer binding method and apparatus." This invention relates to a method and an apparatus for automatically binding a silicon wafer to a carrier plate. In this binding method, the wafer is positioned underneath the carrier plate and then lifted and bonded to the carrier plate at or below atmospheric pressure. Once this is accomplished, the process returns to the previous pressure. The apparatus performing this process includes a carrier means that supplies the carrier plate and wafer to the binding location, ensuring that the binding surface of the carrier plate and wafer are turned upward and transported effectively.
Career Highlights
Yukio Tsutsumi has worked with prominent companies such as Mitsubishi Materials Corporation and Mitsubishi Materials Silicon Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas in the semiconductor industry.
Collaborations
Some of his notable coworkers include Keisuke Takahashi and Tatsumi Matsumoto. Their collaboration has contributed to the successful development of various technologies in the field.
Conclusion
Yukio Tsutsumi's contributions to wafer processing technology through his patents demonstrate his innovative spirit and expertise. His work continues to influence the semiconductor industry, paving the way for future advancements.