Company Filing History:
3 out of 35,689 
2 out of 832,812 Years Active: 2000-2004
Title: Innovations of Yukihiko Maejima
Introduction
Yukihiko Maejima is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on methods that enhance the performance and reliability of semiconductor devices.
Latest Patents
One of his latest patents is a method of fabricating a semiconductor device with a capacitor. This innovative approach prevents leakage current from increasing and maintains dielectric breakdown resistance during the CVD or dry etching process for forming an insulating film. The method involves forming a lower electrode of a capacitor on a first insulating film, which is typically placed over a semiconductor substrate. A dielectric film is then formed on the lower electrode, followed by an upper electrode. A second insulating film is created to cover the capacitor using a thermal CVD process in a non-plasma atmosphere, ensuring that hydrogen is not activated due to heat. The source material used for the second insulating film is designed to prevent hydrogen generation during the thermal CVD process.
Another notable patent by Maejima is related to the manufacturing of a ferroelectric capacitor. In this process, an underlying hydrogen barrier layer is formed on a substrate, followed by the lower electrode layer and the ferroelectric/dielectric layer. After selective etching, a nonconductive hydrogen barrier layer is applied and etched. Following a heat treatment in oxygen, the upper electrode layer and a conductive hydrogen barrier layer are deposited and selectively etched. This comprehensive layering ensures that the memory capacitor is fully protected, utilizing materials such as SiN for the nonconductive layer and metal nitrides like TiN or AlN for the conductive layer.
Career Highlights
Throughout his career, Yukihiko Maejima has worked with notable companies, including NEC Corporation. His expertise in semiconductor technology has positioned him as a key figure in the industry, contributing to advancements that enhance device performance.
Collaborations
He has collaborated with esteemed colleagues such as Jun Kawahara and Yoshihiro Hayashi, further enriching his work and contributions to the field.
Conclusion
Yukihiko Maejima's innovative patents and career achievements highlight his significant role in advancing semiconductor technology. His methods for improving capacitor fabrication and manufacturing processes demonstrate his commitment to enhancing device reliability and performance.