Company Filing History:
Years Active: 2022
Title: Yuki Takeda: Innovator in Extreme Ultraviolet Light Generation
Introduction
Yuki Takeda is a prominent inventor based in Oyama, Japan. He is known for his contributions to the field of extreme ultraviolet light generation, which plays a crucial role in advanced manufacturing processes, particularly in the semiconductor industry. His innovative work has led to the development of a significant patent that enhances the efficiency of electronic device manufacturing.
Latest Patents
Yuki Takeda holds a patent for an "Extreme Ultraviolet Light Generation Apparatus and Electronic Device Manufacturing Method." This invention involves an apparatus that generates plasma by irradiating a target substance with a pulse laser beam. The apparatus is designed to produce extreme ultraviolet light from the plasma and includes several key components: a chamber housing a collector mirror to condense the extreme ultraviolet light, a gas introduction pipe for introducing gas into the chamber, a mass flow controller to adjust the gas flow rate, a discharge pump to remove gas from the chamber, a pressure sensor to monitor chamber pressure, and a control unit that regulates the mass flow controller based on pressure readings. The control unit is programmed to increase the gas flow rate entering the chamber as the pressure rises, optimizing the light generation process.
Career Highlights
Yuki Takeda's career is marked by his dedication to innovation in the field of light generation technology. His work at Gigaphoton Inc. has positioned him as a key player in the development of advanced manufacturing solutions. His patent reflects his commitment to improving the efficiency and effectiveness of electronic device production.
Collaborations
Yuki Takeda collaborates with Yutaka Shiraishi, a talented woman in the field, contributing to the advancement of their shared goals in technology and innovation.
Conclusion
Yuki Takeda's contributions to extreme ultraviolet light generation exemplify the spirit of innovation in the technology sector. His patent not only showcases his inventive capabilities but also highlights the importance of collaboration in achieving groundbreaking advancements.