Yuken Nakamoto

Title: Yuken Nakamoto: Innovator in Projection Aligner Technology

Introduction

Yuken Nakamoto is a prominent inventor based in Tokyo, Japan. She has made significant contributions to the field of optical systems, particularly with her innovative work on projection aligners. Her expertise and creativity have led to the development of a unique patent that enhances the precision of photolithography processes.

Latest Patents

Yuken Nakamoto holds a patent for a projection aligner. This invention comprises a projection optical system designed to radiate a luminous flux, including ultraviolet rays, onto a photomask. The system projects the luminous flux that has passed through the photomask onto a substrate coated with photoresist. The projection aligner features a substrate table for mounting the substrate and a light-blocking mechanism that covers the peripheral portion of the substrate to block unwanted luminous flux. The light-blocking means includes two semicircular members that can move towards and away from each other, forming an annular shape to effectively cover the substrate's edges.

Career Highlights

Yuken Nakamoto has established herself as a key figure in the field of optical engineering. Her work at Orc Manufacturing Co., Ltd. has allowed her to apply her innovative ideas in a practical setting. She has been recognized for her contributions to the advancement of photolithography technology, which is crucial for semiconductor manufacturing.

Collaborations

Due to space constraints, the details of Yuken Nakamoto's collaborations will not be included.

Conclusion

Yuken Nakamoto's contributions to the field of projection aligners demonstrate her innovative spirit and technical expertise. Her patent reflects her commitment to advancing optical technology, making her a notable inventor in her field.