Yuk-Hong Ting

Title: Innovations by Yuk-Hong Ting: Pioneering Advances in Semiconductor Processing

Introduction

Yuk-Hong Ting, a noted inventor based in Fremont, CA, has made significant contributions to the field of semiconductor processing. With a strong focus on improving materials used in substrate processing systems, he has developed innovative solutions that address critical issues within the industry.

Latest Patents

Yuk-Hong Ting is credited with one patent titled "Systems and methods for reducing copper contamination due to substrate processing chambers with components made of alloys including copper." This innovative patent outlines methods for minimizing copper contamination in substrate processing systems. It describes a process involving a plasma treatment conducted in a chamber where components made of copper alloys are utilized. The patent emphasizes the necessity of conditioning the component using a plasma process that incorporates a mixture of molecular oxygen and forming gas, effectively preparing the chamber before the substrate is processed.

Career Highlights

Ting works at Lam Research Corporation, a leader in semiconductor manufacturing equipment. His work within this esteemed company showcases his dedication to advancing technologies that enhance efficiency and performance in semiconductor fabrication.

Collaborations

Throughout his career, Yuk-Hong Ting has collaborated with talented professionals, including Haoquan Fang and David Wingto Cheung. These collaborations underline the importance of teamwork in driving innovation in the fast-paced realm of technology and semiconductor engineering.

Conclusion

Yuk-Hong Ting's contributions through his patent and work at Lam Research Corporation underline the critical advancements in reducing contamination during substrate processing. His innovative approaches pave the way for more efficient semiconductor manufacturing processes, showcasing the importance of continued research and development in this vital industry.