Company Filing History:
Years Active: 2018
Title: Yuji Takabatake - Innovator in Substrate Processing Technology
Introduction
Yuji Takabatake is an inventor based in Oshu-shi, Japan. He has made significant contributions to the field of substrate processing technology. His innovative approach focuses on enhancing the efficiency and effectiveness of substrate processing apparatuses.
Latest Patent Applications
One of his notable patent applications is for a "SUBSTRATE PROCESSING APPARATUS USING ROTATABLE TABLE." This apparatus performs substrate processing by supplying a process gas to a circular substrate loaded on a rotatable table within a vacuum container while the substrate is rotating. The design includes a recess formed at one side of the rotatable table to receive the substrate. Additionally, it features a heater that heats the rotatable table to temperatures of 600 degrees or more for processing. The apparatus also incorporates six support pins positioned on the bottom surface of the recess, arranged at the vertices of a regular hexagon. These support pins hold the substrate at locations that are two-thirds (2/3) of the radius of the substrate from its center, ensuring that the substrate is raised from the bottom surface of the recess during processing.
Conclusion
Yuji Takabatake's work in substrate processing technology showcases his innovative spirit and dedication to advancing the field. His contributions, particularly through his latest patent application, highlight the potential for improved substrate processing methods.